AEM 001 - Scanning Electron Microscopy and Microanalysis

Course Description

Certificate I: Scanning Electron Microscopy and Microanalysis

1. September 8 2014:  Instrumentation overview and system maintenance, Specimen preparation (1.5hr).
2. September 8 2014: Image formation, SEM column, beam/specimen interactions SEM signals, (1.5h).
3. September 9 2014: Detectors and contrast mechanisms, image quality and SEM experimental parameters (1.5h).
4. September 9 2014:  Image interpretation, quantitative image analysis with ImageJ (1.5h).
5. September 10 2014: Advanced imaging: variable pressure, low voltage, high resolution, channeling contrast, cathodoluminescence, scanning voltage contrast (1.5hr).
6. September 10 2014: EDX detector and basic principle, data acquisition, potential issues, general rules (1.5h)
7. September 11 2014: Elemental qualification, quantification and mapping, data processing etc. (1.5h)
8. September 11 2014: Wavelength Dispersive spectroscopy and Calculating Thin Film thickness by collecting spectra from top down (1.5h)
9. September 12 2014: Application of SEM/EDX in semiconductor device failure analysis (1.5h)
10.  September 12 2014: Application of SEM/EDX in metallurgy (1.5h)

SEM/EDX Lab

1. September 8 2014, SEM sample loading, beam optimization (2h)
2. September 8 2014, Sample preparation Part I(2h)
3. September 8 2014, Introduction to ImageJ(2h)
4. September 9 2014, SEM imaging detectors and acquisition(2h)
5. September 9 2014, Sample Preparation Part II(2h)
6. September 9 2014, Overview of particle analysis standards(2h)
7. September 10 2014, Low vacuum imaging (2h)
8. September 10 2014, Sample Preparation Part III(2h)
9. September 10 2014, Data batch processing with ImageJ (2h)
10. September 11 2014, SEM/EDX acquisition(2h)
11. September 11 2014, EDX data processing Part I(2h)
12. September 11 2014, EDX data processing Part II(2h)
13. September 12 2014, Package/fracture surface analysis (2h)
14. September 12 2014, EDX data processing Part III(2h)
15. September 12 2014, Certificate exam (1h)

Applies Towards the Following Certificates

• Engineering Certificate in Applied Electron Microscopy : Individual Electron Microscopy Course Listings